Ellipsometrie-Inversion

Fit von n(λ), k(λ) und d aus spektroskopischen Ellipsometriedaten Ψ, Δ. Single- oder Multi-Angle. Cauchy + Urbach-Dispersionsmodell.

Cauchy + Urbach dispersion model fit by bounded gradient-descent. Multi-angle data resolves the (n, d) ambiguity of single-angle measurements. Built-in synthetic demo dataset; CSV upload supported.