エリプソメトリー逆解析
分光エリプソメトリーΨ、Δデータからn(λ)、k(λ)、dをフィッティング。単角度または多角度。Cauchy + Urbach分散モデル。
Cauchy + Urbach dispersion model fit by bounded gradient-descent. Multi-angle data resolves the (n, d) ambiguity of single-angle measurements. Built-in synthetic demo dataset; CSV upload supported.