Stoney應力與基板翹曲
從測量的基板曲率計算薄膜等雙軸應力，或預測目標應力下的晶圓翹曲。12種基板材料。
Stoney equation (1909) implementation with 12 substrate mechanical models (Si, glass, polymers). Two directions: σ → R and R → σ. Includes sag calculation and a thin-film-limit validity check.
從測量的基板曲率計算薄膜等雙軸應力，或預測目標應力下的晶圓翹曲。12種基板材料。
Stoney equation (1909) implementation with 12 substrate mechanical models (Si, glass, polymers). Two directions: σ → R and R → σ. Includes sag calculation and a thin-film-limit validity check.