Stoney应力与基板翘曲
从测量的基板曲率计算薄膜等双轴应力，或预测目标应力下的晶圆翘曲。12种基板材料。
Stoney equation (1909) implementation with 12 substrate mechanical models (Si, glass, polymers). Two directions: σ → R and R → σ. Includes sag calculation and a thin-film-limit validity check.
从测量的基板曲率计算薄膜等双轴应力，或预测目标应力下的晶圆翘曲。12种基板材料。
Stoney equation (1909) implementation with 12 substrate mechanical models (Si, glass, polymers). Two directions: σ → R and R → σ. Includes sag calculation and a thin-film-limit validity check.